Åttoscopy™, Inc. is pleased to announce its participation in a joint venture called SideWays™ Systems Inc. SideWays™ is developing a product line for Critical Dimension measurement including reentrant structures at and below 45 nanometers!
This new development will extend AFM sidewall metrology down to 5nm. The new technique also permits substantial improvement in the speed of measurement to meet the production inspection demands of the semiconductor industry.

Åttoscopy™, Inc. is an early-stage company in Berkeley, CA with deep expertise in scanning probe microscopy (SPM). The company is leveraging a set of patented technologies to develop unique SPM-based imaging solutions for the semiconductor, biotechnology and research markets. The company’s first product is the
Å
scope™ 1010
running the advanced ÅProbe™  7.0 Software Suite. The  platform can support up to 300mm wafers and larger structures with up to 3mm of height variation across the object. Speed is essentially real time for most actions while resolution is 1nm in all axis. Relatively insensitive to thermal drift, and vibration the instrument can fit in your process on your floor at the cleanliness level required by your problem. Unique diamond probes are so reliable and long lived they permit months of metrology without replacement.

Ångström :

A metric unit of length convenient for atomic dimensions: a tenth of a nanometer or 100 picometers (0.1 nm = 100 pm = 1 Å). Unit popular among physicists but not officially recognized as part of the SI (vide SI unit-naming conventions) equal to 10-10 m. Abbreviated Å. Named after Anders Jones Ångström 1814-74 pronounced 'aw[ng] str[oe]m. 

Technically, SI accepts the temporary continued use of this unit and the liter. This is leading by running out in front of a moving parade.

attometer 10-18 meter, an electron is about a thousand attometers across                                                         

 


 

Contact us to learn more...